Patent
US 8,476,739field effect transistor with graphene channel
single crystalline alpha-alumina c-plane
Al₂O₃
3C-SiC thin film
SiC
inter-atomic-layer distance graphene/metal-oxide interface (claimed range, claim 19) | 0.3–0.34 | Cmetal oxide layer (containing aluminum and/or silicon) |
Duration | 5–60 minutes | — |
Thickness | 0.3–0.34 nm | — |
Duration | 0.5–1 hours | — |
Thickness | 10–500 nm | — |
Thickness | 0.34–25 nm | — |
Thickness | 0.34–30 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 1 nm | — |
field effect transistor with graphene channel
single crystalline alpha-alumina c-plane
Al₂O₃
3C-SiC thin film
SiC
inter-atomic-layer distance graphene/metal-oxide interface (claimed range, claim 19) | 0.3–0.34 | Cmetal oxide layer (containing aluminum and/or silicon) |
Duration | 5–60 minutes | — |
Thickness | 0.3–0.34 nm | — |
Duration | 0.5–1 hours | — |
Thickness | 10–500 nm | — |
Thickness | 0.34–25 nm | — |
Thickness | 0.34–30 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 1 nm | — |
field effect transistor with graphene channel
single crystalline alpha-alumina c-plane
Al₂O₃
3C-SiC thin film
SiC
inter-atomic-layer distance graphene/metal-oxide interface (claimed range, claim 19) | 0.3–0.34 | Cmetal oxide layer (containing aluminum and/or silicon) |
Duration | 5–60 minutes | — |
Thickness | 0.3–0.34 nm | — |
Duration | 0.5–1 hours | — |
Thickness | 10–500 nm | — |
Thickness | 0.34–25 nm | — |
Thickness | 0.34–30 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 1 nm | — |
field effect transistor with graphene channel
single crystalline alpha-alumina c-plane
Al₂O₃
3C-SiC thin film
SiC
inter-atomic-layer distance graphene/metal-oxide interface (claimed range, claim 19) | 0.3–0.34 | Cmetal oxide layer (containing aluminum and/or silicon) |
Duration | 5–60 minutes | — |
Thickness | 0.3–0.34 nm | — |
Duration | 0.5–1 hours | — |
Thickness | 10–500 nm | — |
Thickness | 0.34–25 nm | — |
Thickness | 0.34–30 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 1 nm | — |