Patent
US 9,919,929Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for etching graphene, the method comprising: providing a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; disposing graphene on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; applying a resist to a surface of the graphene opposite to the patterned substrate, wherein applying the resist to the surface of the graphene comprises applying a hydrophobic resist or a hydrophilic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate, and wherein portions of the surface of the graphene not covered by the resist form exposed portions of the graphene; and etching the exposed portions of the graphene to form one or more etched graphene structures. Previously presented
The method of Claim 1, further comprising curing the resist. Original
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophobic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the hydrophobic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophilic resist to the surface of the graphene, the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the hydrophilic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the hydrophilic resist or the hydrophobic resist to the surface of graphene comprises applying a hydrophilic surfactant resist or a hydrophobic surfactant resist to the surface of the graphene. Previously presented
The method of Claim 1, further comprising removing the resist after etching the exposed portions of the graphene. Previously presented
The method of Claim 1, further comprising removing the patterned substrate from the one or more etched graphene structures, wherein removing the patterned substrate comp ri ses: adhering one or more of the etched graphene structures to a release tape; peeling the release tape to separate the one or more of the etched graphene structures from the patterned substrate; and heating and/or irradiating the release tape to separate the one or more of the etched graphene structures from the release tape. Currently amended
The method of Claim 1. wherein the one or more hydrophobic regions comprises one or more of a void, a non-polar polymer, and a fluoropolymer. Previously presented
Canceled
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13 -16. Canceled
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-19. Canceled
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-25. Canceled
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A graphene composite comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; graphene disposed on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a hydrophobic resist or a hydrophilic resist, the hydrophobic resist is disposed on portions of the substrate overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist is disposed on portions of the substrate overlying the one or more hydrophilic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the one or more hydrophobic regions comprise one or more of a void, a non-polar polymer, and a fluoropolymer. Original
The graphene composite of Claim 27, wherein the resist is the hydrophobic resist and is disposed on. portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the resist is the hydrophilic resist and is disposed on portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate Previously presented
29-33. Canceled
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- 42. Canceled
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A graphene composit,. comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; one or more graphene structures overlying the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate, wherein a shape of the one or more graphene structures corresponds to a shape of the hydrophobic regions or the hydrophilic regions of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a surfactant resist and is disposed on portions of the substrate overlying either the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate. Currently amended
The graphene composite of Claim 43, wherein the resist is a cured resist. Previously presented
The composite of Claim 43, wherein the one or more graphene structures are not covered by the resist and form the exposed portions of the graphene. Previously presented
The graphene composite of Claim 43, wherein the surfactant resist comprises one or more of a block copolymer, a vinyl-containing surfactant, a thi ol -containing surfactant, a[[.]] phospholipid surfactant, a nonionic surfactant, or a haloalkyl group. Currently amended
Canceled
-58. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
etched graphene structure (method product)
graphene composite (claim 27)
graphene composite with surfactant resist (claim 43)
Materials described outside the worked examples.
graphene
hydrophobic resist
hydrophilic resist
surfactant resist
fluoropolymer/non-polar polymer
hydrophobic resist: aryl-epoxy resin, poly(methyl methacrylate), phenol formaldehyde resin, or fluorinated block copolymer containing 2-methyl-2-adamantyl methacrylate and perfluoroalkyl methacrylate
hydrophilic resist: poly(methyl glutarimide), poly(methyl methacrylate), or phenol formaldehyde resin
patterned substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 10–20000000 nm | — |
Thickness | 100–1000000 nm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 2 nm | — |
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for etching graphene, the method comprising: providing a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; disposing graphene on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; applying a resist to a surface of the graphene opposite to the patterned substrate, wherein applying the resist to the surface of the graphene comprises applying a hydrophobic resist or a hydrophilic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate, and wherein portions of the surface of the graphene not covered by the resist form exposed portions of the graphene; and etching the exposed portions of the graphene to form one or more etched graphene structures. Previously presented
The method of Claim 1, further comprising curing the resist. Original
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophobic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the hydrophobic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophilic resist to the surface of the graphene, the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the hydrophilic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the hydrophilic resist or the hydrophobic resist to the surface of graphene comprises applying a hydrophilic surfactant resist or a hydrophobic surfactant resist to the surface of the graphene. Previously presented
The method of Claim 1, further comprising removing the resist after etching the exposed portions of the graphene. Previously presented
The method of Claim 1, further comprising removing the patterned substrate from the one or more etched graphene structures, wherein removing the patterned substrate comp ri ses: adhering one or more of the etched graphene structures to a release tape; peeling the release tape to separate the one or more of the etched graphene structures from the patterned substrate; and heating and/or irradiating the release tape to separate the one or more of the etched graphene structures from the release tape. Currently amended
The method of Claim 1. wherein the one or more hydrophobic regions comprises one or more of a void, a non-polar polymer, and a fluoropolymer. Previously presented
Canceled
Canceled
Canceled
Canceled
13 -16. Canceled
Canceled
-19. Canceled
Canceled
-25. Canceled
Canceled
A graphene composite comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; graphene disposed on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a hydrophobic resist or a hydrophilic resist, the hydrophobic resist is disposed on portions of the substrate overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist is disposed on portions of the substrate overlying the one or more hydrophilic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the one or more hydrophobic regions comprise one or more of a void, a non-polar polymer, and a fluoropolymer. Original
The graphene composite of Claim 27, wherein the resist is the hydrophobic resist and is disposed on. portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the resist is the hydrophilic resist and is disposed on portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate Previously presented
29-33. Canceled
Canceled
Canceled
- 42. Canceled
Canceled
A graphene composit,. comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; one or more graphene structures overlying the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate, wherein a shape of the one or more graphene structures corresponds to a shape of the hydrophobic regions or the hydrophilic regions of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a surfactant resist and is disposed on portions of the substrate overlying either the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate. Currently amended
The graphene composite of Claim 43, wherein the resist is a cured resist. Previously presented
The composite of Claim 43, wherein the one or more graphene structures are not covered by the resist and form the exposed portions of the graphene. Previously presented
The graphene composite of Claim 43, wherein the surfactant resist comprises one or more of a block copolymer, a vinyl-containing surfactant, a thi ol -containing surfactant, a[[.]] phospholipid surfactant, a nonionic surfactant, or a haloalkyl group. Currently amended
Canceled
-58. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
etched graphene structure (method product)
graphene composite (claim 27)
graphene composite with surfactant resist (claim 43)
Materials described outside the worked examples.
graphene
hydrophobic resist
hydrophilic resist
surfactant resist
fluoropolymer/non-polar polymer
hydrophobic resist: aryl-epoxy resin, poly(methyl methacrylate), phenol formaldehyde resin, or fluorinated block copolymer containing 2-methyl-2-adamantyl methacrylate and perfluoroalkyl methacrylate
hydrophilic resist: poly(methyl glutarimide), poly(methyl methacrylate), or phenol formaldehyde resin
patterned substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 10–20000000 nm | — |
Thickness | 100–1000000 nm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 2 nm | — |
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for etching graphene, the method comprising: providing a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; disposing graphene on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; applying a resist to a surface of the graphene opposite to the patterned substrate, wherein applying the resist to the surface of the graphene comprises applying a hydrophobic resist or a hydrophilic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate, and wherein portions of the surface of the graphene not covered by the resist form exposed portions of the graphene; and etching the exposed portions of the graphene to form one or more etched graphene structures. Previously presented
The method of Claim 1, further comprising curing the resist. Original
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophobic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the hydrophobic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophilic resist to the surface of the graphene, the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the hydrophilic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the hydrophilic resist or the hydrophobic resist to the surface of graphene comprises applying a hydrophilic surfactant resist or a hydrophobic surfactant resist to the surface of the graphene. Previously presented
The method of Claim 1, further comprising removing the resist after etching the exposed portions of the graphene. Previously presented
The method of Claim 1, further comprising removing the patterned substrate from the one or more etched graphene structures, wherein removing the patterned substrate comp ri ses: adhering one or more of the etched graphene structures to a release tape; peeling the release tape to separate the one or more of the etched graphene structures from the patterned substrate; and heating and/or irradiating the release tape to separate the one or more of the etched graphene structures from the release tape. Currently amended
The method of Claim 1. wherein the one or more hydrophobic regions comprises one or more of a void, a non-polar polymer, and a fluoropolymer. Previously presented
Canceled
Canceled
Canceled
Canceled
13 -16. Canceled
Canceled
-19. Canceled
Canceled
-25. Canceled
Canceled
A graphene composite comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; graphene disposed on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a hydrophobic resist or a hydrophilic resist, the hydrophobic resist is disposed on portions of the substrate overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist is disposed on portions of the substrate overlying the one or more hydrophilic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the one or more hydrophobic regions comprise one or more of a void, a non-polar polymer, and a fluoropolymer. Original
The graphene composite of Claim 27, wherein the resist is the hydrophobic resist and is disposed on. portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the resist is the hydrophilic resist and is disposed on portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate Previously presented
29-33. Canceled
Canceled
Canceled
- 42. Canceled
Canceled
A graphene composit,. comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; one or more graphene structures overlying the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate, wherein a shape of the one or more graphene structures corresponds to a shape of the hydrophobic regions or the hydrophilic regions of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a surfactant resist and is disposed on portions of the substrate overlying either the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate. Currently amended
The graphene composite of Claim 43, wherein the resist is a cured resist. Previously presented
The composite of Claim 43, wherein the one or more graphene structures are not covered by the resist and form the exposed portions of the graphene. Previously presented
The graphene composite of Claim 43, wherein the surfactant resist comprises one or more of a block copolymer, a vinyl-containing surfactant, a thi ol -containing surfactant, a[[.]] phospholipid surfactant, a nonionic surfactant, or a haloalkyl group. Currently amended
Canceled
-58. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
etched graphene structure (method product)
graphene composite (claim 27)
graphene composite with surfactant resist (claim 43)
Materials described outside the worked examples.
graphene
hydrophobic resist
hydrophilic resist
surfactant resist
fluoropolymer/non-polar polymer
hydrophobic resist: aryl-epoxy resin, poly(methyl methacrylate), phenol formaldehyde resin, or fluorinated block copolymer containing 2-methyl-2-adamantyl methacrylate and perfluoroalkyl methacrylate
hydrophilic resist: poly(methyl glutarimide), poly(methyl methacrylate), or phenol formaldehyde resin
patterned substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 10–20000000 nm | — |
Thickness | 100–1000000 nm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 2 nm | — |
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for etching graphene, the method comprising: providing a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; disposing graphene on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; applying a resist to a surface of the graphene opposite to the patterned substrate, wherein applying the resist to the surface of the graphene comprises applying a hydrophobic resist or a hydrophilic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate, and wherein portions of the surface of the graphene not covered by the resist form exposed portions of the graphene; and etching the exposed portions of the graphene to form one or more etched graphene structures. Previously presented
The method of Claim 1, further comprising curing the resist. Original
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophobic resist to the surface of the graphene, the hydrophobic resist selectively adheres to portions of the surface of the graphene overlying the hydrophobic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the resist to the surface of the graphene comprises applying the hydrophilic resist to the surface of the graphene, the hydrophilic resist selectively adheres to portions of the surface of the graphene overlying the hydrophilic regions of the patterned substrate. Previously presented
The method of Claim 1, wherein applying the hydrophilic resist or the hydrophobic resist to the surface of graphene comprises applying a hydrophilic surfactant resist or a hydrophobic surfactant resist to the surface of the graphene. Previously presented
The method of Claim 1, further comprising removing the resist after etching the exposed portions of the graphene. Previously presented
The method of Claim 1, further comprising removing the patterned substrate from the one or more etched graphene structures, wherein removing the patterned substrate comp ri ses: adhering one or more of the etched graphene structures to a release tape; peeling the release tape to separate the one or more of the etched graphene structures from the patterned substrate; and heating and/or irradiating the release tape to separate the one or more of the etched graphene structures from the release tape. Currently amended
The method of Claim 1. wherein the one or more hydrophobic regions comprises one or more of a void, a non-polar polymer, and a fluoropolymer. Previously presented
Canceled
Canceled
Canceled
Canceled
13 -16. Canceled
Canceled
-19. Canceled
Canceled
-25. Canceled
Canceled
A graphene composite comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; graphene disposed on the one or more hydrophobic regions and on the one or more hydrophilic regions patterned on the surface of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a hydrophobic resist or a hydrophilic resist, the hydrophobic resist is disposed on portions of the substrate overlying the one or more hydrophobic regions of the patterned substrate and the hydrophilic resist is disposed on portions of the substrate overlying the one or more hydrophilic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the one or more hydrophobic regions comprise one or more of a void, a non-polar polymer, and a fluoropolymer. Original
The graphene composite of Claim 27, wherein the resist is the hydrophobic resist and is disposed on. portions of the surface of the graphene overlying the one or more hydrophobic regions of the patterned substrate. Previously presented
The graphene composite of Claim 27, wherein the resist is the hydrophilic resist and is disposed on portions of the surface of the graphene overlying the one or more hydrophilic regions of the patterned substrate Previously presented
29-33. Canceled
Canceled
Canceled
- 42. Canceled
Canceled
A graphene composit,. comprising: a patterned substrate comprising one or more hydrophobic regions and one or more hydrophilic regions patterned on a surface of the patterned substrate; one or more graphene structures overlying the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate, wherein a shape of the one or more graphene structures corresponds to a shape of the hydrophobic regions or the hydrophilic regions of the patterned substrate; and a resist disposed on portions of a surface of the graphene opposite to the patterned substrate, wherein the resist is a surfactant resist and is disposed on portions of the substrate overlying either the one or more hydrophobic regions or the one or more hydrophilic regions of the patterned substrate. Currently amended
The graphene composite of Claim 43, wherein the resist is a cured resist. Previously presented
The composite of Claim 43, wherein the one or more graphene structures are not covered by the resist and form the exposed portions of the graphene. Previously presented
The graphene composite of Claim 43, wherein the surfactant resist comprises one or more of a block copolymer, a vinyl-containing surfactant, a thi ol -containing surfactant, a[[.]] phospholipid surfactant, a nonionic surfactant, or a haloalkyl group. Currently amended
Canceled
-58. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
etched graphene structure (method product)
graphene composite (claim 27)
graphene composite with surfactant resist (claim 43)
Materials described outside the worked examples.
graphene
hydrophobic resist
hydrophilic resist
surfactant resist
fluoropolymer/non-polar polymer
hydrophobic resist: aryl-epoxy resin, poly(methyl methacrylate), phenol formaldehyde resin, or fluorinated block copolymer containing 2-methyl-2-adamantyl methacrylate and perfluoroalkyl methacrylate
hydrophilic resist: poly(methyl glutarimide), poly(methyl methacrylate), or phenol formaldehyde resin
patterned substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 10–20000000 nm | — |
Thickness | 100–1000000 nm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 2 nm | — |