Patent
US 10,908,107NITROGEN OXIDE GAS SENSOR BASED ON SULFUR DOPED GRAPHENE AND PREPARATION METHOD THEREFOR
TIE LI
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,908,107Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 illustrates a flowchart of a preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene provided by the present invention.
FIG. 2a. b) The intrinsic graphene 21 is transferred onto a micro heater platform substrate 23 by using a direct transfer method. In this embodiment, the micro …
FIG. 3e. Speci fi cally, fi rstly, PMMA 27 is uniformly coated onto the surface of the intrinsic 1 graphene 21, and the micro heater platform substrate 23 is …
FIG. 4. It needs to be stated that the drawings provided in the following embodiments are just used for schematically describing the basic concept of the 1 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene, characterized in that the method comprises the following steps: 1) providing graphene and a micro heater platform substrate, and transferring the graphene onto the micro heater platform substrate; 2) putting the micro heater platform substrate covered with the graphene into a chemical vapor deposition reaction furnace; 3) performing gas feeding and exhausting treatment to the reaction furnace by using inert gas; 4) simultaneously feeding inert gas and hydrogen gas into the reaction furnace at a first temperature; 5) feeding inert gas, hydrogen gas and sulfur source gas into the reaction furnace at a second temperature for reaction to perform sulfur doping to the graphene; and 6) stopping feeding the sulfur source gas, and performing cooling to the reaction furnace in a hydrogen gas and insert gas shielding atmosphere. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is intrinsic graphene. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the micro heater platform substrate is a single micro heater platform or a wafer level substrate. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), a test electrode and a heater are provided on the micro heater platform substrate, and the graphene at least covers the test electrode. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is transferred onto the micro heater platform substrate by adopting a direct transfer method or PMMA method. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 3), the flow rate of the inert gas is 5 00s c cm-5000sc cm, and the gas feeding and exhausting treatment time is 2min-3 0 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 4), the first temperature is 200 ° C-700 ° C; the flow rate of mixed gas of the hydrogen gas and the inert gas is 100sc cm- 5000sc cm; and the mixing ratio of the hydrogen gas to the inert gas is 10 %-90%. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), the second temperature is 300 ° C-900 ° C; the flow rate of the inert gas is 5 00s c cm- 5000sc cm, the flow rate of the hydrogen gas is 10sc cm- 1 00sc c m and the flow rate of the sulfur source gas is 0. 5sc cm- 50sc cm; and the doping time is 10 min- 50 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that the sulfur source gas comprises one or more of hydrogen sulfide and carbonyl sulfide. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), temperature is increased from the first temperature to the second temperature, the temperature is kept at the second temperature for min-20min, and then the sulfur source gas is fed into the reaction furnace. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 6), the flow rate of the inert gas is 50sc cm-300s c cm, and the flow rate of the hydrogen gas is 10sc cm-40s c cm. Withdrawn
A nitrogen oxide gas sensor based on sulfur-doped graphene-comprising: a micro heater platform substrate with a first surface and a second surface; a test electrode located on the first surface of the micro heater platform substrate a heater located on the second surface of the micro heater platform substrate; and a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate.. Currently amended
Canceled
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater.. Currently amended
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a wafer level substrate s, a plurality of test electrodes and a plurality of heaters are respectively distributed in an array on the first surface and the second surface, and the plurality o f test electrodes correspond to the plurality of heaters one to one in location. Currently amended
Canceled
A nitrogen oxide gas sensor based on sulfur-doped graphene comprising: a micro heater platform substrate with a first surface and a second surface; a heater located on the first surface of the micro heater platform substrate; an insulating layer located on the heater; a test electrode located on the insulating layer; a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate. New
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 18, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater. New
The nitrogen oxide gas sensor based on the micro heater platform substrate is a wafer level plurality of heaters are respectively distributed in platform substrate, and the plurality of test electrodes one in location. New sulfur-doped graphene according to claim 18, wherein substrate, a plurality of test electrodes and a an array on the first surface of the micro heater correspond to the plurality of heaters one to
Layer stacks claimed or described, ordered top of device to substrate.
nitrogen oxide gas sensor (two-surface configuration)
nitrogen oxide gas sensor (single micro heater platform, one pair of electrodes)
Materials described outside the worked examples.
graphene
sulfur-doped graphene
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 10,908,107Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 illustrates a flowchart of a preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene provided by the present invention.
FIG. 2a. b) The intrinsic graphene 21 is transferred onto a micro heater platform substrate 23 by using a direct transfer method. In this embodiment, the micro …
FIG. 3e. Speci fi cally, fi rstly, PMMA 27 is uniformly coated onto the surface of the intrinsic 1 graphene 21, and the micro heater platform substrate 23 is …
FIG. 4. It needs to be stated that the drawings provided in the following embodiments are just used for schematically describing the basic concept of the 1 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene, characterized in that the method comprises the following steps: 1) providing graphene and a micro heater platform substrate, and transferring the graphene onto the micro heater platform substrate; 2) putting the micro heater platform substrate covered with the graphene into a chemical vapor deposition reaction furnace; 3) performing gas feeding and exhausting treatment to the reaction furnace by using inert gas; 4) simultaneously feeding inert gas and hydrogen gas into the reaction furnace at a first temperature; 5) feeding inert gas, hydrogen gas and sulfur source gas into the reaction furnace at a second temperature for reaction to perform sulfur doping to the graphene; and 6) stopping feeding the sulfur source gas, and performing cooling to the reaction furnace in a hydrogen gas and insert gas shielding atmosphere. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is intrinsic graphene. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the micro heater platform substrate is a single micro heater platform or a wafer level substrate. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), a test electrode and a heater are provided on the micro heater platform substrate, and the graphene at least covers the test electrode. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is transferred onto the micro heater platform substrate by adopting a direct transfer method or PMMA method. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 3), the flow rate of the inert gas is 5 00s c cm-5000sc cm, and the gas feeding and exhausting treatment time is 2min-3 0 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 4), the first temperature is 200 ° C-700 ° C; the flow rate of mixed gas of the hydrogen gas and the inert gas is 100sc cm- 5000sc cm; and the mixing ratio of the hydrogen gas to the inert gas is 10 %-90%. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), the second temperature is 300 ° C-900 ° C; the flow rate of the inert gas is 5 00s c cm- 5000sc cm, the flow rate of the hydrogen gas is 10sc cm- 1 00sc c m and the flow rate of the sulfur source gas is 0. 5sc cm- 50sc cm; and the doping time is 10 min- 50 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that the sulfur source gas comprises one or more of hydrogen sulfide and carbonyl sulfide. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), temperature is increased from the first temperature to the second temperature, the temperature is kept at the second temperature for min-20min, and then the sulfur source gas is fed into the reaction furnace. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 6), the flow rate of the inert gas is 50sc cm-300s c cm, and the flow rate of the hydrogen gas is 10sc cm-40s c cm. Withdrawn
A nitrogen oxide gas sensor based on sulfur-doped graphene-comprising: a micro heater platform substrate with a first surface and a second surface; a test electrode located on the first surface of the micro heater platform substrate a heater located on the second surface of the micro heater platform substrate; and a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate.. Currently amended
Canceled
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater.. Currently amended
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a wafer level substrate s, a plurality of test electrodes and a plurality of heaters are respectively distributed in an array on the first surface and the second surface, and the plurality o f test electrodes correspond to the plurality of heaters one to one in location. Currently amended
Canceled
A nitrogen oxide gas sensor based on sulfur-doped graphene comprising: a micro heater platform substrate with a first surface and a second surface; a heater located on the first surface of the micro heater platform substrate; an insulating layer located on the heater; a test electrode located on the insulating layer; a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate. New
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 18, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater. New
The nitrogen oxide gas sensor based on the micro heater platform substrate is a wafer level plurality of heaters are respectively distributed in platform substrate, and the plurality of test electrodes one in location. New sulfur-doped graphene according to claim 18, wherein substrate, a plurality of test electrodes and a an array on the first surface of the micro heater correspond to the plurality of heaters one to
Layer stacks claimed or described, ordered top of device to substrate.
nitrogen oxide gas sensor (two-surface configuration)
nitrogen oxide gas sensor (single micro heater platform, one pair of electrodes)
Materials described outside the worked examples.
graphene
sulfur-doped graphene
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 10,908,107Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 illustrates a flowchart of a preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene provided by the present invention.
FIG. 2a. b) The intrinsic graphene 21 is transferred onto a micro heater platform substrate 23 by using a direct transfer method. In this embodiment, the micro …
FIG. 3e. Speci fi cally, fi rstly, PMMA 27 is uniformly coated onto the surface of the intrinsic 1 graphene 21, and the micro heater platform substrate 23 is …
FIG. 4. It needs to be stated that the drawings provided in the following embodiments are just used for schematically describing the basic concept of the 1 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene, characterized in that the method comprises the following steps: 1) providing graphene and a micro heater platform substrate, and transferring the graphene onto the micro heater platform substrate; 2) putting the micro heater platform substrate covered with the graphene into a chemical vapor deposition reaction furnace; 3) performing gas feeding and exhausting treatment to the reaction furnace by using inert gas; 4) simultaneously feeding inert gas and hydrogen gas into the reaction furnace at a first temperature; 5) feeding inert gas, hydrogen gas and sulfur source gas into the reaction furnace at a second temperature for reaction to perform sulfur doping to the graphene; and 6) stopping feeding the sulfur source gas, and performing cooling to the reaction furnace in a hydrogen gas and insert gas shielding atmosphere. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is intrinsic graphene. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the micro heater platform substrate is a single micro heater platform or a wafer level substrate. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), a test electrode and a heater are provided on the micro heater platform substrate, and the graphene at least covers the test electrode. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is transferred onto the micro heater platform substrate by adopting a direct transfer method or PMMA method. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 3), the flow rate of the inert gas is 5 00s c cm-5000sc cm, and the gas feeding and exhausting treatment time is 2min-3 0 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 4), the first temperature is 200 ° C-700 ° C; the flow rate of mixed gas of the hydrogen gas and the inert gas is 100sc cm- 5000sc cm; and the mixing ratio of the hydrogen gas to the inert gas is 10 %-90%. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), the second temperature is 300 ° C-900 ° C; the flow rate of the inert gas is 5 00s c cm- 5000sc cm, the flow rate of the hydrogen gas is 10sc cm- 1 00sc c m and the flow rate of the sulfur source gas is 0. 5sc cm- 50sc cm; and the doping time is 10 min- 50 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that the sulfur source gas comprises one or more of hydrogen sulfide and carbonyl sulfide. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), temperature is increased from the first temperature to the second temperature, the temperature is kept at the second temperature for min-20min, and then the sulfur source gas is fed into the reaction furnace. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 6), the flow rate of the inert gas is 50sc cm-300s c cm, and the flow rate of the hydrogen gas is 10sc cm-40s c cm. Withdrawn
A nitrogen oxide gas sensor based on sulfur-doped graphene-comprising: a micro heater platform substrate with a first surface and a second surface; a test electrode located on the first surface of the micro heater platform substrate a heater located on the second surface of the micro heater platform substrate; and a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate.. Currently amended
Canceled
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater.. Currently amended
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a wafer level substrate s, a plurality of test electrodes and a plurality of heaters are respectively distributed in an array on the first surface and the second surface, and the plurality o f test electrodes correspond to the plurality of heaters one to one in location. Currently amended
Canceled
A nitrogen oxide gas sensor based on sulfur-doped graphene comprising: a micro heater platform substrate with a first surface and a second surface; a heater located on the first surface of the micro heater platform substrate; an insulating layer located on the heater; a test electrode located on the insulating layer; a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate. New
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 18, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater. New
The nitrogen oxide gas sensor based on the micro heater platform substrate is a wafer level plurality of heaters are respectively distributed in platform substrate, and the plurality of test electrodes one in location. New sulfur-doped graphene according to claim 18, wherein substrate, a plurality of test electrodes and a an array on the first surface of the micro heater correspond to the plurality of heaters one to
Layer stacks claimed or described, ordered top of device to substrate.
nitrogen oxide gas sensor (two-surface configuration)
nitrogen oxide gas sensor (single micro heater platform, one pair of electrodes)
Materials described outside the worked examples.
graphene
sulfur-doped graphene
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 10,908,107Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 illustrates a flowchart of a preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene provided by the present invention.
FIG. 2a. b) The intrinsic graphene 21 is transferred onto a micro heater platform substrate 23 by using a direct transfer method. In this embodiment, the micro …
FIG. 3e. Speci fi cally, fi rstly, PMMA 27 is uniformly coated onto the surface of the intrinsic 1 graphene 21, and the micro heater platform substrate 23 is …
FIG. 4. It needs to be stated that the drawings provided in the following embodiments are just used for schematically describing the basic concept of the 1 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method for nitrogen oxide gas sensor based on sulfur-doped graphene, characterized in that the method comprises the following steps: 1) providing graphene and a micro heater platform substrate, and transferring the graphene onto the micro heater platform substrate; 2) putting the micro heater platform substrate covered with the graphene into a chemical vapor deposition reaction furnace; 3) performing gas feeding and exhausting treatment to the reaction furnace by using inert gas; 4) simultaneously feeding inert gas and hydrogen gas into the reaction furnace at a first temperature; 5) feeding inert gas, hydrogen gas and sulfur source gas into the reaction furnace at a second temperature for reaction to perform sulfur doping to the graphene; and 6) stopping feeding the sulfur source gas, and performing cooling to the reaction furnace in a hydrogen gas and insert gas shielding atmosphere. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is intrinsic graphene. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the micro heater platform substrate is a single micro heater platform or a wafer level substrate. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), a test electrode and a heater are provided on the micro heater platform substrate, and the graphene at least covers the test electrode. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 1), the graphene is transferred onto the micro heater platform substrate by adopting a direct transfer method or PMMA method. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 3), the flow rate of the inert gas is 5 00s c cm-5000sc cm, and the gas feeding and exhausting treatment time is 2min-3 0 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 4), the first temperature is 200 ° C-700 ° C; the flow rate of mixed gas of the hydrogen gas and the inert gas is 100sc cm- 5000sc cm; and the mixing ratio of the hydrogen gas to the inert gas is 10 %-90%. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), the second temperature is 300 ° C-900 ° C; the flow rate of the inert gas is 5 00s c cm- 5000sc cm, the flow rate of the hydrogen gas is 10sc cm- 1 00sc c m and the flow rate of the sulfur source gas is 0. 5sc cm- 50sc cm; and the doping time is 10 min- 50 min. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that the sulfur source gas comprises one or more of hydrogen sulfide and carbonyl sulfide. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 5), temperature is increased from the first temperature to the second temperature, the temperature is kept at the second temperature for min-20min, and then the sulfur source gas is fed into the reaction furnace. Withdrawn
The preparation method for nitrogen oxide gas sensor based on sulfur- doped graphene according to claim 1, characterized in that, in step 6), the flow rate of the inert gas is 50sc cm-300s c cm, and the flow rate of the hydrogen gas is 10sc cm-40s c cm. Withdrawn
A nitrogen oxide gas sensor based on sulfur-doped graphene-comprising: a micro heater platform substrate with a first surface and a second surface; a test electrode located on the first surface of the micro heater platform substrate a heater located on the second surface of the micro heater platform substrate; and a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate.. Currently amended
Canceled
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater.. Currently amended
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 1244, wherein the micro heater platform substrate is a wafer level substrate s, a plurality of test electrodes and a plurality of heaters are respectively distributed in an array on the first surface and the second surface, and the plurality o f test electrodes correspond to the plurality of heaters one to one in location. Currently amended
Canceled
A nitrogen oxide gas sensor based on sulfur-doped graphene comprising: a micro heater platform substrate with a first surface and a second surface; a heater located on the first surface of the micro heater platform substrate; an insulating layer located on the heater; a test electrode located on the insulating layer; a sulfur-doped graphene located on the first surface of the micro heater platform substrate covering the test electrode and the first surface of the micro heater platform substrate. New
The nitrogen oxide gas sensor based on sulfur-doped graphene according to claim 18, wherein the micro heater platform substrate is a single micro heater platform, the number of the test electrode is one pair, the number of the heater is one, and the pair of test electrode is disposed above the heater. New
The nitrogen oxide gas sensor based on the micro heater platform substrate is a wafer level plurality of heaters are respectively distributed in platform substrate, and the plurality of test electrodes one in location. New sulfur-doped graphene according to claim 18, wherein substrate, a plurality of test electrodes and a an array on the first surface of the micro heater correspond to the plurality of heaters one to
Layer stacks claimed or described, ordered top of device to substrate.
nitrogen oxide gas sensor (two-surface configuration)
nitrogen oxide gas sensor (single micro heater platform, one pair of electrodes)
Materials described outside the worked examples.
graphene
sulfur-doped graphene
Additional fabrication and treatment steps described in the patent.
nitrogen oxide gas sensor (wafer level, array configuration, two-surface)
nitrogen oxide gas sensor (single-surface, heater + insulating layer + electrode stack)
nitrogen oxide gas sensor (single-surface single micro heater, one pair of electrodes)
nitrogen oxide gas sensor (single-surface wafer level array)
intrinsic graphene
sulfur source gas
hydrogen sulfide
H₂S
carbonyl sulfide
COS
nitrogen oxide gas sensor (wafer level, array configuration, two-surface)
nitrogen oxide gas sensor (single-surface, heater + insulating layer + electrode stack)
nitrogen oxide gas sensor (single-surface single micro heater, one pair of electrodes)
nitrogen oxide gas sensor (single-surface wafer level array)
intrinsic graphene
sulfur source gas
hydrogen sulfide
H₂S
carbonyl sulfide
COS
nitrogen oxide gas sensor (wafer level, array configuration, two-surface)
nitrogen oxide gas sensor (single-surface, heater + insulating layer + electrode stack)
nitrogen oxide gas sensor (single-surface single micro heater, one pair of electrodes)
nitrogen oxide gas sensor (single-surface wafer level array)
intrinsic graphene
sulfur source gas
hydrogen sulfide
H₂S
carbonyl sulfide
COS
nitrogen oxide gas sensor (wafer level, array configuration, two-surface)
nitrogen oxide gas sensor (single-surface, heater + insulating layer + electrode stack)
nitrogen oxide gas sensor (single-surface single micro heater, one pair of electrodes)
nitrogen oxide gas sensor (single-surface wafer level array)
intrinsic graphene
sulfur source gas
hydrogen sulfide
H₂S
carbonyl sulfide
COS