NANOWIRE EPITAXY ON A GRAPHITIC SUBSTRATE | Matter42 Literature
Patent
Atlas literature
Patent
US 10,861,696
NANOWIRE EPITAXY ON A GRAPHITIC SUBSTRATE
Helge Weman, Bjorn-Ove Fimland, Dong Chul Kim
NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 2
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
Figure 4
Figure 4 sh o ws a depiction of a mask o n the graphite surface, which has been etched with h o les. The invention will now be described with reference to the f o llowing non limiting examples. Examp le 1 Experime n tal p r ocedure: Nanowires (NWs) were grown in a Varian Gen II Modular molecular …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 1 dependent
1
Independentgroup III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition of matter comprising at least one nanowire on a graphitic substrate, said at least one nanowire having been grown epitaxially on said substrate, wherein said nanowire comprises at least one group III -V compound or at least one group I I -VI compound or comprises at least one non carbon group IV element.
2
Dependent← claim 1group III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition as claimed in claim 1 wherein said nanowire grows in the
111
Independent
[111] or [0001] direction.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
epitaxial nanowire on graphitic substrate
group III-V compoundnanowire
graphitic substratesubstrate
Materials
Materials described outside the worked examples.
group III-V compound
Claimed Nanowire Material
group II-VI compound
Claimed Nanowire Material
non-carbon group IV element
Process steps
Additional fabrication and treatment steps described in the patent.
1
Mbe Growth
Step 1
Process details
notes:catalyst-assisted epitaxial nanowire growth on graphitic substrate
method:molecular beam epitaxy
substrate:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
sem
SEM
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 2
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
Figure 4
Figure 4 sh o ws a depiction of a mask o n the graphite surface, which has been etched with h o les. The invention will now be described with reference to the f o llowing non limiting examples. Examp le 1 Experime n tal p r ocedure: Nanowires (NWs) were grown in a Varian Gen II Modular molecular …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 1 dependent
1
Independentgroup III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition of matter comprising at least one nanowire on a graphitic substrate, said at least one nanowire having been grown epitaxially on said substrate, wherein said nanowire comprises at least one group III -V compound or at least one group I I -VI compound or comprises at least one non carbon group IV element.
2
Dependent← claim 1group III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition as claimed in claim 1 wherein said nanowire grows in the
111
Independent
[111] or [0001] direction.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
epitaxial nanowire on graphitic substrate
group III-V compoundnanowire
graphitic substratesubstrate
Materials
Materials described outside the worked examples.
group III-V compound
Claimed Nanowire Material
group II-VI compound
Claimed Nanowire Material
non-carbon group IV element
Process steps
Additional fabrication and treatment steps described in the patent.
1
Mbe Growth
Step 1
Process details
notes:catalyst-assisted epitaxial nanowire growth on graphitic substrate
method:molecular beam epitaxy
substrate:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
sem
SEM
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 2
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
Figure 4
Figure 4 sh o ws a depiction of a mask o n the graphite surface, which has been etched with h o les. The invention will now be described with reference to the f o llowing non limiting examples. Examp le 1 Experime n tal p r ocedure: Nanowires (NWs) were grown in a Varian Gen II Modular molecular …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 1 dependent
1
Independentgroup III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition of matter comprising at least one nanowire on a graphitic substrate, said at least one nanowire having been grown epitaxially on said substrate, wherein said nanowire comprises at least one group III -V compound or at least one group I I -VI compound or comprises at least one non carbon group IV element.
2
Dependent← claim 1group III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition as claimed in claim 1 wherein said nanowire grows in the
111
Independent
[111] or [0001] direction.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
epitaxial nanowire on graphitic substrate
group III-V compoundnanowire
graphitic substratesubstrate
Materials
Materials described outside the worked examples.
group III-V compound
Claimed Nanowire Material
group II-VI compound
Claimed Nanowire Material
non-carbon group IV element
Process steps
Additional fabrication and treatment steps described in the patent.
1
Mbe Growth
Step 1
Process details
notes:catalyst-assisted epitaxial nanowire growth on graphitic substrate
method:molecular beam epitaxy
substrate:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
sem
SEM
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 2
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …
Figure 4
Figure 4 sh o ws a depiction of a mask o n the graphite surface, which has been etched with h o les. The invention will now be described with reference to the f o llowing non limiting examples. Examp le 1 Experime n tal p r ocedure: Nanowires (NWs) were grown in a Varian Gen II Modular molecular …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 1 dependent
1
Independentgroup III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition of matter comprising at least one nanowire on a graphitic substrate, said at least one nanowire having been grown epitaxially on said substrate, wherein said nanowire comprises at least one group III -V compound or at least one group I I -VI compound or comprises at least one non carbon group IV element.
2
Dependent← claim 1group III-V compoundgroup II-VI compoundnon-carbon group IV elementgraphitic substrateepitaxial nanowire on graphitic substrate
A composition as claimed in claim 1 wherein said nanowire grows in the
111
Independent
[111] or [0001] direction.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
epitaxial nanowire on graphitic substrate
group III-V compoundnanowire
graphitic substratesubstrate
Materials
Materials described outside the worked examples.
group III-V compound
Claimed Nanowire Material
group II-VI compound
Claimed Nanowire Material
non-carbon group IV element
Process steps
Additional fabrication and treatment steps described in the patent.
1
Mbe Growth
Step 1
Process details
notes:catalyst-assisted epitaxial nanowire growth on graphitic substrate
method:molecular beam epitaxy
substrate:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
sem
SEM
Figure 2 shows a MBE experimental set up. Figure 3a is an idealised depiction of Ga (self) catalysed GaAs nanowires grown o n graphite. Figure 3b is a 45 ' tilted view SEM image of two vertical Ga assisted GaAs nanowires grown by MBE o n a fla ke of Kish graphite. The spherical particles are Ga …