Patent
US 10,584,034resist
buffer solution
potassium chloride
KCl
tris(hydroxymethyl)aminomethane hydrochloride
ethylenediaminetetraacetic acid
EDTA
double-stranded unmethylated lambda DNA
polymethylmethacrylate resist
deionized water
FIG. 5 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the distance of a water film with respect to relative humidity …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
| 2–6 V |
| — |
Voltage | 5–25 V | — |
Thickness | 8–12 nm | — |
resist
buffer solution
potassium chloride
KCl
tris(hydroxymethyl)aminomethane hydrochloride
ethylenediaminetetraacetic acid
EDTA
double-stranded unmethylated lambda DNA
polymethylmethacrylate resist
deionized water
FIG. 5 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the distance of a water film with respect to relative humidity …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
| 2–6 V |
| — |
Voltage | 5–25 V | — |
Thickness | 8–12 nm | — |
resist
buffer solution
potassium chloride
KCl
tris(hydroxymethyl)aminomethane hydrochloride
ethylenediaminetetraacetic acid
EDTA
double-stranded unmethylated lambda DNA
polymethylmethacrylate resist
deionized water
FIG. 5 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the distance of a water film with respect to relative humidity …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
| 2–6 V |
| — |
Voltage | 5–25 V | — |
Thickness | 8–12 nm | — |
resist
buffer solution
potassium chloride
KCl
tris(hydroxymethyl)aminomethane hydrochloride
ethylenediaminetetraacetic acid
EDTA
double-stranded unmethylated lambda DNA
polymethylmethacrylate resist
deionized water
FIG. 5 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the distance of a water film with respect to relative humidity …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
FIG. 6 is a graph of one embodiment of the method for etching a graphene nanostructure and shows the thickness of a water film with respect to a voltage …
| 2–6 V |
| — |
Voltage | 5–25 V | — |
Thickness | 8–12 nm | — |