Patent
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Patent
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Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1-5 show various views of an example top-emitting implant embodiment.
Figure 6 shows a view of an example bottom-emitting implant embodiment.
Figures 7 and 7A-7C show views of an example top-emitting oxidation embodiment.
Figures 8-14c show various views of an example bottom-emitting oxidation embodiment.
Figure 15 shows a view of an example microstrip embodiment.
Figure 16 shows a view of an example phase coherent embodiment.
Figure 17 shows a view of an example embodiment that employs diffractive optical elements.
Figure 18 shows a view of an example embodiment that employs pattern diffractive grating.
Figure 19 shows a view of an example microlens embodiment.
Figure 20 shows a view of an example tenth embodiment.
Figure 21 shows a view of an example eleventh embodiment.
Figure 22 shows a view of an example twelfth embodiment.
Figure 23 shows an example of an additional pattern for a lasing grid with respect to various embodiments.
Figure 24 comparatively shows current flow as between an example embodiment designed as described herein and that taught by US Pat App. Pub. 2011/0176567.
Figure 25 shows a cross-sectional view of an example laser apparatus that includes a laser structure in combination with a graphene lens structure.
Figure 26 discloses an example process that can be used to form the graphene lens structure.
Figure 27 shows an example where the graphene lens structure can be designed to vary in terms of width and spacing.
Figure 28 shows an example graphene lens design that can replace the formed lens in extended cavity designs for the laser structure.
Figure 29 shows an example graphene lens design that can replace a diffractive optical element (DOE) in the laser structure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a graphene lens structure located on the substrate, wherein the substrate and the graphene lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the graphene lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 1 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the graphene lens structure is located on the substrate back. New
The apparatus of claim 1 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[2]] 1 wherein the graphene lens structure comprises an array of graphene lenses. Currently amended
The apparatus of claim 3 wherein each of a plurality of the graphene lenses comprises a plurality of concentric graphene rings. Currently amended
The apparatus of claim [[2]] 1 further comprising: a reflective coating located on a surface of the graphene lens structure. Currently amended
The apparatus of claim [[2]] 1 wherein the graphene lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
CANCELED Canceled
CANCELED Canceled
The apparatus of claim [[8]] 1 wherein the single laser emitting epitaxial structure comprises a single vertical cavity surface emitting laser (VCSEL) epitaxial structure. Currently amended
The apparatus of claim 9 wherein the single VCSEL epitaxial structure does not include a plurality of mesas. Original
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a photolithographic lens structure located on the substrate, wherein the substrate and the photolithographic lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the photolithographic lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 11 wherein the photolithographic lens structure comprises a masked photolithographic lens structure. Original
The apparatus of claim 11 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the photolithographic lens structure is located on the substrate back. New
The apparatus of claim 11 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure comprises an array of photolithographic lenses. Currently amended
The apparatus of claim [[12]] 11 further comprising: a reflective coating located on a surface of the photolithographic structure. Currently amended
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
A method comprising: depositing graphene on a back of a back-emitting multi-conductive grid-forming laser structure, wherein the back-emitting multi-conductive grid-forming laser structure comprises (1) an epitaxial structure comprising a plurality of laser regions within a single mesa structure of the epitaxial structure, each laser region of the single mesa structure being electrically isolated within the single mesa structure itself relative to the other laser regions of the single mesa structure, and (2) a substrate on which the epitaxial structure is located; masking areas of the deposited graphene via photolithography; and forming a graphene lens structure for the back-emitting multi-conductive grid-forming laser structure by plasma etching the deposited graphene so that the masked areas are not plasma etched and the graphene lens structure will direct light from each of a plurality of the laser regions when a current is applied to the back-emitting multi-conductive grid-forming laser structure. Currently amended
The method of claim 17 wherein the masking step comprises masking a plurality of concentric graphene rings that are to serve as the graphene lens structure. Original
The method of claim 17 further comprising: depositing a reflective coating over a surface of the graphene lens structure. Original
Layer stacks claimed or described, ordered top of device to substrate.
back-emitting laser apparatus with graphene lens structure
single VCSEL epitaxial structure with graphene lens
Materials described outside the worked examples.
graphene
GaAs
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–10 µm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1-5 show various views of an example top-emitting implant embodiment.
Figure 6 shows a view of an example bottom-emitting implant embodiment.
Figures 7 and 7A-7C show views of an example top-emitting oxidation embodiment.
Figures 8-14c show various views of an example bottom-emitting oxidation embodiment.
Figure 15 shows a view of an example microstrip embodiment.
Figure 16 shows a view of an example phase coherent embodiment.
Figure 17 shows a view of an example embodiment that employs diffractive optical elements.
Figure 18 shows a view of an example embodiment that employs pattern diffractive grating.
Figure 19 shows a view of an example microlens embodiment.
Figure 20 shows a view of an example tenth embodiment.
Figure 21 shows a view of an example eleventh embodiment.
Figure 22 shows a view of an example twelfth embodiment.
Figure 23 shows an example of an additional pattern for a lasing grid with respect to various embodiments.
Figure 24 comparatively shows current flow as between an example embodiment designed as described herein and that taught by US Pat App. Pub. 2011/0176567.
Figure 25 shows a cross-sectional view of an example laser apparatus that includes a laser structure in combination with a graphene lens structure.
Figure 26 discloses an example process that can be used to form the graphene lens structure.
Figure 27 shows an example where the graphene lens structure can be designed to vary in terms of width and spacing.
Figure 28 shows an example graphene lens design that can replace the formed lens in extended cavity designs for the laser structure.
Figure 29 shows an example graphene lens design that can replace a diffractive optical element (DOE) in the laser structure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a graphene lens structure located on the substrate, wherein the substrate and the graphene lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the graphene lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 1 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the graphene lens structure is located on the substrate back. New
The apparatus of claim 1 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[2]] 1 wherein the graphene lens structure comprises an array of graphene lenses. Currently amended
The apparatus of claim 3 wherein each of a plurality of the graphene lenses comprises a plurality of concentric graphene rings. Currently amended
The apparatus of claim [[2]] 1 further comprising: a reflective coating located on a surface of the graphene lens structure. Currently amended
The apparatus of claim [[2]] 1 wherein the graphene lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
CANCELED Canceled
CANCELED Canceled
The apparatus of claim [[8]] 1 wherein the single laser emitting epitaxial structure comprises a single vertical cavity surface emitting laser (VCSEL) epitaxial structure. Currently amended
The apparatus of claim 9 wherein the single VCSEL epitaxial structure does not include a plurality of mesas. Original
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a photolithographic lens structure located on the substrate, wherein the substrate and the photolithographic lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the photolithographic lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 11 wherein the photolithographic lens structure comprises a masked photolithographic lens structure. Original
The apparatus of claim 11 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the photolithographic lens structure is located on the substrate back. New
The apparatus of claim 11 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure comprises an array of photolithographic lenses. Currently amended
The apparatus of claim [[12]] 11 further comprising: a reflective coating located on a surface of the photolithographic structure. Currently amended
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
A method comprising: depositing graphene on a back of a back-emitting multi-conductive grid-forming laser structure, wherein the back-emitting multi-conductive grid-forming laser structure comprises (1) an epitaxial structure comprising a plurality of laser regions within a single mesa structure of the epitaxial structure, each laser region of the single mesa structure being electrically isolated within the single mesa structure itself relative to the other laser regions of the single mesa structure, and (2) a substrate on which the epitaxial structure is located; masking areas of the deposited graphene via photolithography; and forming a graphene lens structure for the back-emitting multi-conductive grid-forming laser structure by plasma etching the deposited graphene so that the masked areas are not plasma etched and the graphene lens structure will direct light from each of a plurality of the laser regions when a current is applied to the back-emitting multi-conductive grid-forming laser structure. Currently amended
The method of claim 17 wherein the masking step comprises masking a plurality of concentric graphene rings that are to serve as the graphene lens structure. Original
The method of claim 17 further comprising: depositing a reflective coating over a surface of the graphene lens structure. Original
Layer stacks claimed or described, ordered top of device to substrate.
back-emitting laser apparatus with graphene lens structure
single VCSEL epitaxial structure with graphene lens
Materials described outside the worked examples.
graphene
GaAs
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–10 µm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1-5 show various views of an example top-emitting implant embodiment.
Figure 6 shows a view of an example bottom-emitting implant embodiment.
Figures 7 and 7A-7C show views of an example top-emitting oxidation embodiment.
Figures 8-14c show various views of an example bottom-emitting oxidation embodiment.
Figure 15 shows a view of an example microstrip embodiment.
Figure 16 shows a view of an example phase coherent embodiment.
Figure 17 shows a view of an example embodiment that employs diffractive optical elements.
Figure 18 shows a view of an example embodiment that employs pattern diffractive grating.
Figure 19 shows a view of an example microlens embodiment.
Figure 20 shows a view of an example tenth embodiment.
Figure 21 shows a view of an example eleventh embodiment.
Figure 22 shows a view of an example twelfth embodiment.
Figure 23 shows an example of an additional pattern for a lasing grid with respect to various embodiments.
Figure 24 comparatively shows current flow as between an example embodiment designed as described herein and that taught by US Pat App. Pub. 2011/0176567.
Figure 25 shows a cross-sectional view of an example laser apparatus that includes a laser structure in combination with a graphene lens structure.
Figure 26 discloses an example process that can be used to form the graphene lens structure.
Figure 27 shows an example where the graphene lens structure can be designed to vary in terms of width and spacing.
Figure 28 shows an example graphene lens design that can replace the formed lens in extended cavity designs for the laser structure.
Figure 29 shows an example graphene lens design that can replace a diffractive optical element (DOE) in the laser structure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a graphene lens structure located on the substrate, wherein the substrate and the graphene lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the graphene lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 1 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the graphene lens structure is located on the substrate back. New
The apparatus of claim 1 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[2]] 1 wherein the graphene lens structure comprises an array of graphene lenses. Currently amended
The apparatus of claim 3 wherein each of a plurality of the graphene lenses comprises a plurality of concentric graphene rings. Currently amended
The apparatus of claim [[2]] 1 further comprising: a reflective coating located on a surface of the graphene lens structure. Currently amended
The apparatus of claim [[2]] 1 wherein the graphene lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
CANCELED Canceled
CANCELED Canceled
The apparatus of claim [[8]] 1 wherein the single laser emitting epitaxial structure comprises a single vertical cavity surface emitting laser (VCSEL) epitaxial structure. Currently amended
The apparatus of claim 9 wherein the single VCSEL epitaxial structure does not include a plurality of mesas. Original
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a photolithographic lens structure located on the substrate, wherein the substrate and the photolithographic lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the photolithographic lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 11 wherein the photolithographic lens structure comprises a masked photolithographic lens structure. Original
The apparatus of claim 11 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the photolithographic lens structure is located on the substrate back. New
The apparatus of claim 11 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure comprises an array of photolithographic lenses. Currently amended
The apparatus of claim [[12]] 11 further comprising: a reflective coating located on a surface of the photolithographic structure. Currently amended
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
A method comprising: depositing graphene on a back of a back-emitting multi-conductive grid-forming laser structure, wherein the back-emitting multi-conductive grid-forming laser structure comprises (1) an epitaxial structure comprising a plurality of laser regions within a single mesa structure of the epitaxial structure, each laser region of the single mesa structure being electrically isolated within the single mesa structure itself relative to the other laser regions of the single mesa structure, and (2) a substrate on which the epitaxial structure is located; masking areas of the deposited graphene via photolithography; and forming a graphene lens structure for the back-emitting multi-conductive grid-forming laser structure by plasma etching the deposited graphene so that the masked areas are not plasma etched and the graphene lens structure will direct light from each of a plurality of the laser regions when a current is applied to the back-emitting multi-conductive grid-forming laser structure. Currently amended
The method of claim 17 wherein the masking step comprises masking a plurality of concentric graphene rings that are to serve as the graphene lens structure. Original
The method of claim 17 further comprising: depositing a reflective coating over a surface of the graphene lens structure. Original
Layer stacks claimed or described, ordered top of device to substrate.
back-emitting laser apparatus with graphene lens structure
single VCSEL epitaxial structure with graphene lens
Materials described outside the worked examples.
graphene
GaAs
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–10 µm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1-5 show various views of an example top-emitting implant embodiment.
Figure 6 shows a view of an example bottom-emitting implant embodiment.
Figures 7 and 7A-7C show views of an example top-emitting oxidation embodiment.
Figures 8-14c show various views of an example bottom-emitting oxidation embodiment.
Figure 15 shows a view of an example microstrip embodiment.
Figure 16 shows a view of an example phase coherent embodiment.
Figure 17 shows a view of an example embodiment that employs diffractive optical elements.
Figure 18 shows a view of an example embodiment that employs pattern diffractive grating.
Figure 19 shows a view of an example microlens embodiment.
Figure 20 shows a view of an example tenth embodiment.
Figure 21 shows a view of an example eleventh embodiment.
Figure 22 shows a view of an example twelfth embodiment.
Figure 23 shows an example of an additional pattern for a lasing grid with respect to various embodiments.
Figure 24 comparatively shows current flow as between an example embodiment designed as described herein and that taught by US Pat App. Pub. 2011/0176567.
Figure 25 shows a cross-sectional view of an example laser apparatus that includes a laser structure in combination with a graphene lens structure.
Figure 26 discloses an example process that can be used to form the graphene lens structure.
Figure 27 shows an example where the graphene lens structure can be designed to vary in terms of width and spacing.
Figure 28 shows an example graphene lens design that can replace the formed lens in extended cavity designs for the laser structure.
Figure 29 shows an example graphene lens design that can replace a diffractive optical element (DOE) in the laser structure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a graphene lens structure located on the substrate, wherein the substrate and the graphene lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the graphene lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 1 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the graphene lens structure is located on the substrate back. New
The apparatus of claim 1 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[2]] 1 wherein the graphene lens structure comprises an array of graphene lenses. Currently amended
The apparatus of claim 3 wherein each of a plurality of the graphene lenses comprises a plurality of concentric graphene rings. Currently amended
The apparatus of claim [[2]] 1 further comprising: a reflective coating located on a surface of the graphene lens structure. Currently amended
The apparatus of claim [[2]] 1 wherein the graphene lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
CANCELED Canceled
CANCELED Canceled
The apparatus of claim [[8]] 1 wherein the single laser emitting epitaxial structure comprises a single vertical cavity surface emitting laser (VCSEL) epitaxial structure. Currently amended
The apparatus of claim 9 wherein the single VCSEL epitaxial structure does not include a plurality of mesas. Original
An apparatus comprising: a laser-emitting epitaxial structure having a front and a back, wherein the laser-emitting epitaxial structure comprises a plurality of laser regions, and wherein the laser-emitting epitaxial structure is back-emitting; [[and]] a substrate on which the laser-emitting epitaxial structure is located; a photolithographic lens structure located on the substrate, wherein the substrate and the photolithographic lens structure are located in an optical path for back-emitting laser light from the laser-emitting epitaxial structure; and an electrical waveguide configured to provide current to the laser regions; wherein the photolithographic lens structure directs laser light from each of a plurality of the laser regions; and wherein the laser-emitting epitaxial structure comprises a single laser-emitting epitaxial structure, each laser region of the single laser emitting epitaxial structure being electrically isolated within the single laser emitting epitaxial structure itself relative to the other laser regions of the single laser emitting epitaxial structure. Currently amended
The apparatus of claim 11 wherein the photolithographic lens structure comprises a masked photolithographic lens structure. Original
The apparatus of claim 11 wherein the substrate has a substrate front and a substrate back, wherein the laser-emitting epitaxial structure is located on the substrate front, and wherein the photolithographic lens structure is located on the substrate back. New
The apparatus of claim 11 wherein a plurality of the laser regions are within a single mesa structure of the laser-emitting epitaxial structure. New
CANCELED Canceled
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure comprises an array of photolithographic lenses. Currently amended
The apparatus of claim [[12]] 11 further comprising: a reflective coating located on a surface of the photolithographic structure. Currently amended
The apparatus of claim [[12]] 11 wherein the photolithographic lens structure is configured to direct light from the laser regions to emulate light originating from a single source. Currently amended
A method comprising: depositing graphene on a back of a back-emitting multi-conductive grid-forming laser structure, wherein the back-emitting multi-conductive grid-forming laser structure comprises (1) an epitaxial structure comprising a plurality of laser regions within a single mesa structure of the epitaxial structure, each laser region of the single mesa structure being electrically isolated within the single mesa structure itself relative to the other laser regions of the single mesa structure, and (2) a substrate on which the epitaxial structure is located; masking areas of the deposited graphene via photolithography; and forming a graphene lens structure for the back-emitting multi-conductive grid-forming laser structure by plasma etching the deposited graphene so that the masked areas are not plasma etched and the graphene lens structure will direct light from each of a plurality of the laser regions when a current is applied to the back-emitting multi-conductive grid-forming laser structure. Currently amended
The method of claim 17 wherein the masking step comprises masking a plurality of concentric graphene rings that are to serve as the graphene lens structure. Original
The method of claim 17 further comprising: depositing a reflective coating over a surface of the graphene lens structure. Original
Layer stacks claimed or described, ordered top of device to substrate.
back-emitting laser apparatus with graphene lens structure
single VCSEL epitaxial structure with graphene lens
Materials described outside the worked examples.
graphene
GaAs
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–10 µm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
back-emitting laser apparatus with photolithographic lens structure
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back-emitting laser apparatus with photolithographic lens structure
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back-emitting laser apparatus with photolithographic lens structure
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back-emitting laser apparatus with photolithographic lens structure
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