Patent
US 8,343,366Patent
Atlas literature
Patent
US 8,343,366Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(E), the graphene substrate with the realigned oxide nanowires 130 is placed in a focused ion beam (FIB) apparatus, and then an ion beam milling process …
FIG. 2 is a flowchart that shows a method for fabricating a graphene structure according to the first example embodiment. [0010]
FIGS. 3A-3G illustrate a process of a method for fabricating a graphene structure according to a second example embodiment. [0011]
FIG. 4 is a flowchart that shows a method for fabricating a graphene structure according to the second example embodiment. [0012]
FIGS. 5A-5F illustrate a process of a method for fabricating a graphene structure according to a third example embodiment. [0013]
FIG. 6 is a flowchart that shows a method for fabricating a graphene structure according to the third example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for fabricating a graphene nanostructure, comprising: forming an oxide nanostructure on a graphene layer; aligning the oxide nanostructure i on the graphene layer; performing anisotropic etching of the graphene layer by using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure after the anisotropic etching.
The method of claim 1, wherein the graphene layer is formed on a substrate.
The method of claim 1, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
-2- Application No.: 12/211006 Filing Date: 8. A method for fabricating a graphene nanostructure, comprising: forming a metal layer on a graphene layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene layer using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure and a remaining metal layer nanostructure after the anisotropic etching.
The method of claim 8, wherein the graphene layer is formed on a substrate.
The method of claim 8, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
A method for fabricating graphene nanostructure, comprising: forming a sacrificial layer on a graphene layer; forming a metal layer on the sacrificial layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene la y er using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure, a remaining metal layer nanostructure, and a sacrificial layer nanostructure after the anisotropic etching.
The method of claim 17, wherein the graphene layer is formed on a substrate.
The method of claim 17, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
Embodiments described in the patent, grouped by the materials and process steps they use.
3 materials3 process steps
A graphene layer is formed on a silicon substrate by dispersing expandable graphite processed at 1000°C in a 3% H₂ atmosphere, sonicating in dichloroethane for ~30 min, and applying to the substrate. Vanadium oxide nanowires are deposited on the graphene layer by dipping the graphene substrate in a vanadium oxide nanowire solution (affinity enhanced by positive voltage). The nanowires, initially randomly oriented, are aligned by dipping in ultrapure water and pulling along a desired direction. Ion beam milling (FIB) is then performed using the aligned nanowires as a mask. After etching, the substrate is rinsed with a buffer solution (1 M NaCl aqueous solution) for ~10 min to remove the oxide nanowires, leaving a nanoscale graphene structure.
5 materials1 process step
A graphene layer is formed on a substrate. A gold metal layer is deposited on the graphene layer using a thermal evaporator or sputter. A molecule layer pattern with a hydrophobic molecule layer (e.g., octadecanethiol) and a hydrophilic molecule layer (e.g., cysteamine) is formed on the gold layer. Oxide nanowires selectively assemble on the hydrophilic region. Ion beam etching is performed using the aligned oxide nanowires as a mask. Remaining oxide nanowires and metal layer nanostructures are removed.
6 materials1 process step
A sacrificial layer (aluminum) is formed on a graphene layer, followed by a gold metal layer. A molecule layer pattern is formed and oxide nanowires are selectively aligned. Ion beam etching is performed. Remaining oxide nanowires, metal layer nanostructure, and sacrificial layer nanostructure are removed. The oxide nanowires are removed with a buffer solution, and the sacrificial aluminum layer nanostructure is removed with tetramethylammonium hydroxide (TMAH) solution.
Materials described outside the worked examples.
oxide nanostructure
vanadium pentoxide
V₂O₅
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,343,366Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(E), the graphene substrate with the realigned oxide nanowires 130 is placed in a focused ion beam (FIB) apparatus, and then an ion beam milling process …
FIG. 2 is a flowchart that shows a method for fabricating a graphene structure according to the first example embodiment. [0010]
FIGS. 3A-3G illustrate a process of a method for fabricating a graphene structure according to a second example embodiment. [0011]
FIG. 4 is a flowchart that shows a method for fabricating a graphene structure according to the second example embodiment. [0012]
FIGS. 5A-5F illustrate a process of a method for fabricating a graphene structure according to a third example embodiment. [0013]
FIG. 6 is a flowchart that shows a method for fabricating a graphene structure according to the third example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for fabricating a graphene nanostructure, comprising: forming an oxide nanostructure on a graphene layer; aligning the oxide nanostructure i on the graphene layer; performing anisotropic etching of the graphene layer by using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure after the anisotropic etching.
The method of claim 1, wherein the graphene layer is formed on a substrate.
The method of claim 1, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
-2- Application No.: 12/211006 Filing Date: 8. A method for fabricating a graphene nanostructure, comprising: forming a metal layer on a graphene layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene layer using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure and a remaining metal layer nanostructure after the anisotropic etching.
The method of claim 8, wherein the graphene layer is formed on a substrate.
The method of claim 8, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
A method for fabricating graphene nanostructure, comprising: forming a sacrificial layer on a graphene layer; forming a metal layer on the sacrificial layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene la y er using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure, a remaining metal layer nanostructure, and a sacrificial layer nanostructure after the anisotropic etching.
The method of claim 17, wherein the graphene layer is formed on a substrate.
The method of claim 17, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
Embodiments described in the patent, grouped by the materials and process steps they use.
3 materials3 process steps
A graphene layer is formed on a silicon substrate by dispersing expandable graphite processed at 1000°C in a 3% H₂ atmosphere, sonicating in dichloroethane for ~30 min, and applying to the substrate. Vanadium oxide nanowires are deposited on the graphene layer by dipping the graphene substrate in a vanadium oxide nanowire solution (affinity enhanced by positive voltage). The nanowires, initially randomly oriented, are aligned by dipping in ultrapure water and pulling along a desired direction. Ion beam milling (FIB) is then performed using the aligned nanowires as a mask. After etching, the substrate is rinsed with a buffer solution (1 M NaCl aqueous solution) for ~10 min to remove the oxide nanowires, leaving a nanoscale graphene structure.
5 materials1 process step
A graphene layer is formed on a substrate. A gold metal layer is deposited on the graphene layer using a thermal evaporator or sputter. A molecule layer pattern with a hydrophobic molecule layer (e.g., octadecanethiol) and a hydrophilic molecule layer (e.g., cysteamine) is formed on the gold layer. Oxide nanowires selectively assemble on the hydrophilic region. Ion beam etching is performed using the aligned oxide nanowires as a mask. Remaining oxide nanowires and metal layer nanostructures are removed.
6 materials1 process step
A sacrificial layer (aluminum) is formed on a graphene layer, followed by a gold metal layer. A molecule layer pattern is formed and oxide nanowires are selectively aligned. Ion beam etching is performed. Remaining oxide nanowires, metal layer nanostructure, and sacrificial layer nanostructure are removed. The oxide nanowires are removed with a buffer solution, and the sacrificial aluminum layer nanostructure is removed with tetramethylammonium hydroxide (TMAH) solution.
Materials described outside the worked examples.
oxide nanostructure
vanadium pentoxide
V₂O₅
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,343,366Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(E), the graphene substrate with the realigned oxide nanowires 130 is placed in a focused ion beam (FIB) apparatus, and then an ion beam milling process …
FIG. 2 is a flowchart that shows a method for fabricating a graphene structure according to the first example embodiment. [0010]
FIGS. 3A-3G illustrate a process of a method for fabricating a graphene structure according to a second example embodiment. [0011]
FIG. 4 is a flowchart that shows a method for fabricating a graphene structure according to the second example embodiment. [0012]
FIGS. 5A-5F illustrate a process of a method for fabricating a graphene structure according to a third example embodiment. [0013]
FIG. 6 is a flowchart that shows a method for fabricating a graphene structure according to the third example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for fabricating a graphene nanostructure, comprising: forming an oxide nanostructure on a graphene layer; aligning the oxide nanostructure i on the graphene layer; performing anisotropic etching of the graphene layer by using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure after the anisotropic etching.
The method of claim 1, wherein the graphene layer is formed on a substrate.
The method of claim 1, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
-2- Application No.: 12/211006 Filing Date: 8. A method for fabricating a graphene nanostructure, comprising: forming a metal layer on a graphene layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene layer using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure and a remaining metal layer nanostructure after the anisotropic etching.
The method of claim 8, wherein the graphene layer is formed on a substrate.
The method of claim 8, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
A method for fabricating graphene nanostructure, comprising: forming a sacrificial layer on a graphene layer; forming a metal layer on the sacrificial layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene la y er using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure, a remaining metal layer nanostructure, and a sacrificial layer nanostructure after the anisotropic etching.
The method of claim 17, wherein the graphene layer is formed on a substrate.
The method of claim 17, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
Embodiments described in the patent, grouped by the materials and process steps they use.
3 materials3 process steps
A graphene layer is formed on a silicon substrate by dispersing expandable graphite processed at 1000°C in a 3% H₂ atmosphere, sonicating in dichloroethane for ~30 min, and applying to the substrate. Vanadium oxide nanowires are deposited on the graphene layer by dipping the graphene substrate in a vanadium oxide nanowire solution (affinity enhanced by positive voltage). The nanowires, initially randomly oriented, are aligned by dipping in ultrapure water and pulling along a desired direction. Ion beam milling (FIB) is then performed using the aligned nanowires as a mask. After etching, the substrate is rinsed with a buffer solution (1 M NaCl aqueous solution) for ~10 min to remove the oxide nanowires, leaving a nanoscale graphene structure.
5 materials1 process step
A graphene layer is formed on a substrate. A gold metal layer is deposited on the graphene layer using a thermal evaporator or sputter. A molecule layer pattern with a hydrophobic molecule layer (e.g., octadecanethiol) and a hydrophilic molecule layer (e.g., cysteamine) is formed on the gold layer. Oxide nanowires selectively assemble on the hydrophilic region. Ion beam etching is performed using the aligned oxide nanowires as a mask. Remaining oxide nanowires and metal layer nanostructures are removed.
6 materials1 process step
A sacrificial layer (aluminum) is formed on a graphene layer, followed by a gold metal layer. A molecule layer pattern is formed and oxide nanowires are selectively aligned. Ion beam etching is performed. Remaining oxide nanowires, metal layer nanostructure, and sacrificial layer nanostructure are removed. The oxide nanowires are removed with a buffer solution, and the sacrificial aluminum layer nanostructure is removed with tetramethylammonium hydroxide (TMAH) solution.
Materials described outside the worked examples.
oxide nanostructure
vanadium pentoxide
V₂O₅
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,343,366Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(E), the graphene substrate with the realigned oxide nanowires 130 is placed in a focused ion beam (FIB) apparatus, and then an ion beam milling process …
FIG. 2 is a flowchart that shows a method for fabricating a graphene structure according to the first example embodiment. [0010]
FIGS. 3A-3G illustrate a process of a method for fabricating a graphene structure according to a second example embodiment. [0011]
FIG. 4 is a flowchart that shows a method for fabricating a graphene structure according to the second example embodiment. [0012]
FIGS. 5A-5F illustrate a process of a method for fabricating a graphene structure according to a third example embodiment. [0013]
FIG. 6 is a flowchart that shows a method for fabricating a graphene structure according to the third example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for fabricating a graphene nanostructure, comprising: forming an oxide nanostructure on a graphene layer; aligning the oxide nanostructure i on the graphene layer; performing anisotropic etching of the graphene layer by using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure after the anisotropic etching.
The method of claim 1, wherein the graphene layer is formed on a substrate.
The method of claim 1, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
-2- Application No.: 12/211006 Filing Date: 8. A method for fabricating a graphene nanostructure, comprising: forming a metal layer on a graphene layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene layer using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure and a remaining metal layer nanostructure after the anisotropic etching.
The method of claim 8, wherein the graphene layer is formed on a substrate.
The method of claim 8, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
A method for fabricating graphene nanostructure, comprising: forming a sacrificial layer on a graphene layer; forming a metal layer on the sacrificial layer; forming a molecule layer pattern having a hydrophobic molecule layer in a first region on the metal layer; aligning an oxide nanostructure in a second region on the metal layer where the hydrophobic molecule layer is not formed; performing anisotropic etching of the graphene la y er using the aligned oxide nanostructure as a mask; and removing a remaining oxide nanostructure, a remaining metal layer nanostructure, and a sacrificial layer nanostructure after the anisotropic etching.
The method of claim 17, wherein the graphene layer is formed on a substrate.
The method of claim 17, wherein the oxide nanostructure comprises a vanadium oxide nanowire.
Embodiments described in the patent, grouped by the materials and process steps they use.
3 materials3 process steps
A graphene layer is formed on a silicon substrate by dispersing expandable graphite processed at 1000°C in a 3% H₂ atmosphere, sonicating in dichloroethane for ~30 min, and applying to the substrate. Vanadium oxide nanowires are deposited on the graphene layer by dipping the graphene substrate in a vanadium oxide nanowire solution (affinity enhanced by positive voltage). The nanowires, initially randomly oriented, are aligned by dipping in ultrapure water and pulling along a desired direction. Ion beam milling (FIB) is then performed using the aligned nanowires as a mask. After etching, the substrate is rinsed with a buffer solution (1 M NaCl aqueous solution) for ~10 min to remove the oxide nanowires, leaving a nanoscale graphene structure.
5 materials1 process step
A graphene layer is formed on a substrate. A gold metal layer is deposited on the graphene layer using a thermal evaporator or sputter. A molecule layer pattern with a hydrophobic molecule layer (e.g., octadecanethiol) and a hydrophilic molecule layer (e.g., cysteamine) is formed on the gold layer. Oxide nanowires selectively assemble on the hydrophilic region. Ion beam etching is performed using the aligned oxide nanowires as a mask. Remaining oxide nanowires and metal layer nanostructures are removed.
6 materials1 process step
A sacrificial layer (aluminum) is formed on a graphene layer, followed by a gold metal layer. A molecule layer pattern is formed and oxide nanowires are selectively aligned. Ion beam etching is performed. Remaining oxide nanowires, metal layer nanostructure, and sacrificial layer nanostructure are removed. The oxide nanowires are removed with a buffer solution, and the sacrificial aluminum layer nanostructure is removed with tetramethylammonium hydroxide (TMAH) solution.
Materials described outside the worked examples.
oxide nanostructure
vanadium pentoxide
V₂O₅
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