Patent
US 9,611,521EXTRACTION OF GALLIUM AND/OR ARSENIC FROM GALLIUM ARSENIDE
Michael R. SIEVERS
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,611,521Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in parallel;
FIG. 2 is a block diagram of an example system for processing a material comprising gallium arsenide including multiple furnaces;
FIG. 3 is a block diagram of an example system for processing a material comprising gallium arsenide including a multi-zone furnace;
FIG. 4 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in series;
FIG. 5 is a flow chart illustrating an example method for processing a material comprising gallium arsenide; all arranged in accordance with at least some …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
1-12. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A system for processing a material comprising gallium arsenide, the system comprising: one or more furnaces configured to heat [[a]]the material comprising gallium arsenide to a first heating condition of about 415 degrees C [[.]] to less than about 1100 degrees C [[.]] and to a second heating condition of above about 1100 degrees C [[.]]; an arsenic collection bed housing an arsenic collection medium comprising aluminum, wherein the aluminum is configured to react with arsenic, and wherein the arsenic collection bed is fluidicly coupled to the one or more furnaces to receive a first exhaust produced by the material undergoing the first heating condition; a gallium collection bed housing a gallium collection medium comprising aluminum, wherein the aluminum is configured to react with gallium, and wherein the gallium collection bed is fluidicly coupled to the one or more furnaces to receive a second exhaust produced by the material undergoing the second heating condition; and a vacuum apparatus fluidicly coupled to the gallium collection bed and configured to draw a vacuum on the one or more furnaces during the second heating condition further comprising an arsenic collection bed isolation valve fluidicly interposing the one or more furnaces and the arsenic collection bed; and gallium collection bed isolation valve fluidicly interposing the one or more furnaces and the gallium collection bed.
The system of claim 13, wherein the gallium collection bed and the arsenic collection bed are fluidicly coupled to the one or more furnaces in series such that the first Attorney Docket No.: 138248.17711 Application No. 14/074,3 29 Page 6 of 9 exhaust and the second exhaust flow through the gallium collection bed to reach the arsenic collection bed.
The system of claim 13, wherein the one or more furnaces comprises a first furnace and a second furnace; wherein the first furnace is configured to heat the material to the first heating condition and is fluidicly coupled to the arsenic collection bed; and wherein the second furnace is configured to heat the material to the second heating condition and is fluidicly coupled to the gallium collection bed.
The system of claim 13, wherein the one or more furnaces comprise a multi- zone furnace comprising a first zone configured to heat the material to the first heating condition and a second zone configured to heat the material to the second heating condition.
The system of claim 13, wherein the vacuum apparatus comprises one or more of a positive displacement pump and a momentum transfer pump.
The system of claim 13, wherein the arsenic collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the gallium collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the one or more furnaces are configured to heat a material comprising gallium arsenide to the first heating condition of about 515 degrees C to about 715 degrees C.
The system of claim 13, wherein one or more furnaces are configured to heat [[a]]the material comprising gallium arsenide to the second heating condition of about 1200 degrees C to about 1400 degrees C.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the arsenic collection bed.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the gallium collection bed.
canceled
Layer stacks claimed or described, ordered top of device to substrate.
system for processing gallium arsenide
No layer stack recorded.
Materials described outside the worked examples.
gallium arsenide
GaAs
aluminum (arsenic collection medium)
Al
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pressure | 0.001–1 Torr | — |
Patent
Atlas literature
Patent
US 9,611,521Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in parallel;
FIG. 2 is a block diagram of an example system for processing a material comprising gallium arsenide including multiple furnaces;
FIG. 3 is a block diagram of an example system for processing a material comprising gallium arsenide including a multi-zone furnace;
FIG. 4 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in series;
FIG. 5 is a flow chart illustrating an example method for processing a material comprising gallium arsenide; all arranged in accordance with at least some …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
1-12. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A system for processing a material comprising gallium arsenide, the system comprising: one or more furnaces configured to heat [[a]]the material comprising gallium arsenide to a first heating condition of about 415 degrees C [[.]] to less than about 1100 degrees C [[.]] and to a second heating condition of above about 1100 degrees C [[.]]; an arsenic collection bed housing an arsenic collection medium comprising aluminum, wherein the aluminum is configured to react with arsenic, and wherein the arsenic collection bed is fluidicly coupled to the one or more furnaces to receive a first exhaust produced by the material undergoing the first heating condition; a gallium collection bed housing a gallium collection medium comprising aluminum, wherein the aluminum is configured to react with gallium, and wherein the gallium collection bed is fluidicly coupled to the one or more furnaces to receive a second exhaust produced by the material undergoing the second heating condition; and a vacuum apparatus fluidicly coupled to the gallium collection bed and configured to draw a vacuum on the one or more furnaces during the second heating condition further comprising an arsenic collection bed isolation valve fluidicly interposing the one or more furnaces and the arsenic collection bed; and gallium collection bed isolation valve fluidicly interposing the one or more furnaces and the gallium collection bed.
The system of claim 13, wherein the gallium collection bed and the arsenic collection bed are fluidicly coupled to the one or more furnaces in series such that the first Attorney Docket No.: 138248.17711 Application No. 14/074,3 29 Page 6 of 9 exhaust and the second exhaust flow through the gallium collection bed to reach the arsenic collection bed.
The system of claim 13, wherein the one or more furnaces comprises a first furnace and a second furnace; wherein the first furnace is configured to heat the material to the first heating condition and is fluidicly coupled to the arsenic collection bed; and wherein the second furnace is configured to heat the material to the second heating condition and is fluidicly coupled to the gallium collection bed.
The system of claim 13, wherein the one or more furnaces comprise a multi- zone furnace comprising a first zone configured to heat the material to the first heating condition and a second zone configured to heat the material to the second heating condition.
The system of claim 13, wherein the vacuum apparatus comprises one or more of a positive displacement pump and a momentum transfer pump.
The system of claim 13, wherein the arsenic collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the gallium collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the one or more furnaces are configured to heat a material comprising gallium arsenide to the first heating condition of about 515 degrees C to about 715 degrees C.
The system of claim 13, wherein one or more furnaces are configured to heat [[a]]the material comprising gallium arsenide to the second heating condition of about 1200 degrees C to about 1400 degrees C.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the arsenic collection bed.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the gallium collection bed.
canceled
Layer stacks claimed or described, ordered top of device to substrate.
system for processing gallium arsenide
No layer stack recorded.
Materials described outside the worked examples.
gallium arsenide
GaAs
aluminum (arsenic collection medium)
Al
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pressure | 0.001–1 Torr | — |
Patent
Atlas literature
Patent
US 9,611,521Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in parallel;
FIG. 2 is a block diagram of an example system for processing a material comprising gallium arsenide including multiple furnaces;
FIG. 3 is a block diagram of an example system for processing a material comprising gallium arsenide including a multi-zone furnace;
FIG. 4 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in series;
FIG. 5 is a flow chart illustrating an example method for processing a material comprising gallium arsenide; all arranged in accordance with at least some …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
1-12. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A system for processing a material comprising gallium arsenide, the system comprising: one or more furnaces configured to heat [[a]]the material comprising gallium arsenide to a first heating condition of about 415 degrees C [[.]] to less than about 1100 degrees C [[.]] and to a second heating condition of above about 1100 degrees C [[.]]; an arsenic collection bed housing an arsenic collection medium comprising aluminum, wherein the aluminum is configured to react with arsenic, and wherein the arsenic collection bed is fluidicly coupled to the one or more furnaces to receive a first exhaust produced by the material undergoing the first heating condition; a gallium collection bed housing a gallium collection medium comprising aluminum, wherein the aluminum is configured to react with gallium, and wherein the gallium collection bed is fluidicly coupled to the one or more furnaces to receive a second exhaust produced by the material undergoing the second heating condition; and a vacuum apparatus fluidicly coupled to the gallium collection bed and configured to draw a vacuum on the one or more furnaces during the second heating condition further comprising an arsenic collection bed isolation valve fluidicly interposing the one or more furnaces and the arsenic collection bed; and gallium collection bed isolation valve fluidicly interposing the one or more furnaces and the gallium collection bed.
The system of claim 13, wherein the gallium collection bed and the arsenic collection bed are fluidicly coupled to the one or more furnaces in series such that the first Attorney Docket No.: 138248.17711 Application No. 14/074,3 29 Page 6 of 9 exhaust and the second exhaust flow through the gallium collection bed to reach the arsenic collection bed.
The system of claim 13, wherein the one or more furnaces comprises a first furnace and a second furnace; wherein the first furnace is configured to heat the material to the first heating condition and is fluidicly coupled to the arsenic collection bed; and wherein the second furnace is configured to heat the material to the second heating condition and is fluidicly coupled to the gallium collection bed.
The system of claim 13, wherein the one or more furnaces comprise a multi- zone furnace comprising a first zone configured to heat the material to the first heating condition and a second zone configured to heat the material to the second heating condition.
The system of claim 13, wherein the vacuum apparatus comprises one or more of a positive displacement pump and a momentum transfer pump.
The system of claim 13, wherein the arsenic collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the gallium collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the one or more furnaces are configured to heat a material comprising gallium arsenide to the first heating condition of about 515 degrees C to about 715 degrees C.
The system of claim 13, wherein one or more furnaces are configured to heat [[a]]the material comprising gallium arsenide to the second heating condition of about 1200 degrees C to about 1400 degrees C.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the arsenic collection bed.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the gallium collection bed.
canceled
Layer stacks claimed or described, ordered top of device to substrate.
system for processing gallium arsenide
No layer stack recorded.
Materials described outside the worked examples.
gallium arsenide
GaAs
aluminum (arsenic collection medium)
Al
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pressure | 0.001–1 Torr | — |
Patent
Atlas literature
Patent
US 9,611,521Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in parallel;
FIG. 2 is a block diagram of an example system for processing a material comprising gallium arsenide including multiple furnaces;
FIG. 3 is a block diagram of an example system for processing a material comprising gallium arsenide including a multi-zone furnace;
FIG. 4 is a block diagram of an example system for processing a material comprising gallium arsenide including collection beds arranged in series;
FIG. 5 is a flow chart illustrating an example method for processing a material comprising gallium arsenide; all arranged in accordance with at least some …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
1-12. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A system for processing a material comprising gallium arsenide, the system comprising: one or more furnaces configured to heat [[a]]the material comprising gallium arsenide to a first heating condition of about 415 degrees C [[.]] to less than about 1100 degrees C [[.]] and to a second heating condition of above about 1100 degrees C [[.]]; an arsenic collection bed housing an arsenic collection medium comprising aluminum, wherein the aluminum is configured to react with arsenic, and wherein the arsenic collection bed is fluidicly coupled to the one or more furnaces to receive a first exhaust produced by the material undergoing the first heating condition; a gallium collection bed housing a gallium collection medium comprising aluminum, wherein the aluminum is configured to react with gallium, and wherein the gallium collection bed is fluidicly coupled to the one or more furnaces to receive a second exhaust produced by the material undergoing the second heating condition; and a vacuum apparatus fluidicly coupled to the gallium collection bed and configured to draw a vacuum on the one or more furnaces during the second heating condition further comprising an arsenic collection bed isolation valve fluidicly interposing the one or more furnaces and the arsenic collection bed; and gallium collection bed isolation valve fluidicly interposing the one or more furnaces and the gallium collection bed.
The system of claim 13, wherein the gallium collection bed and the arsenic collection bed are fluidicly coupled to the one or more furnaces in series such that the first Attorney Docket No.: 138248.17711 Application No. 14/074,3 29 Page 6 of 9 exhaust and the second exhaust flow through the gallium collection bed to reach the arsenic collection bed.
The system of claim 13, wherein the one or more furnaces comprises a first furnace and a second furnace; wherein the first furnace is configured to heat the material to the first heating condition and is fluidicly coupled to the arsenic collection bed; and wherein the second furnace is configured to heat the material to the second heating condition and is fluidicly coupled to the gallium collection bed.
The system of claim 13, wherein the one or more furnaces comprise a multi- zone furnace comprising a first zone configured to heat the material to the first heating condition and a second zone configured to heat the material to the second heating condition.
The system of claim 13, wherein the vacuum apparatus comprises one or more of a positive displacement pump and a momentum transfer pump.
The system of claim 13, wherein the arsenic collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the gallium collection medium comprises aluminum powder particles of about 1 m in size.
The system of claim 13, wherein the one or more furnaces are configured to heat a material comprising gallium arsenide to the first heating condition of about 515 degrees C to about 715 degrees C.
The system of claim 13, wherein one or more furnaces are configured to heat [[a]]the material comprising gallium arsenide to the second heating condition of about 1200 degrees C to about 1400 degrees C.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the arsenic collection bed.
The system of claim 13, further comprising one or more analytical equipments coupled to a conduit between the one or more furnaces and the gallium collection bed.
canceled
Layer stacks claimed or described, ordered top of device to substrate.
system for processing gallium arsenide
No layer stack recorded.
Materials described outside the worked examples.
gallium arsenide
GaAs
aluminum (arsenic collection medium)
Al
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pressure | 0.001–1 Torr | — |
aluminum arsenide
AlAs
gallium-aluminum alloy
aluminum arsenide
AlAs
gallium-aluminum alloy
aluminum arsenide
AlAs
gallium-aluminum alloy
aluminum arsenide
AlAs
gallium-aluminum alloy